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This Safety Guideline pertains to FLDs operating at critical flow rates that result from the ratio of the pressure upstream of the FLD to the pressure downstream of the FLD being at least the critical pressure ratio
in which case the word "mask" can be substituted for "wafer
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 21
本基準係在提供半導體製造設備人因工程的設計原理及考量事項。
SEMI E49-0419 (technical revision)
M03100 - SEMI M31 - 300 mmウェーハの搬送および出荷用フロントオープニング・シッピングボックスの機械仕様 StdPbc-0219 This Safety Guideline pertains toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Silicon Wafer Global Technical Committee200853global Audits and Reviews Subcommittee20086www. semi. org199820073 IC300 mm (front opening shipping Box: FOSB) FOSBFOSB FOSBICFOSBFOUPFOBITICFOSBFOUPFOBIT 5. 4FOSB 5. 4. 1 5. 4. 2