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This Document defines methods used for evaluating color property of the FPD color filters
It includes a specific transfer command state model and transport and storage system controller (TSSC) state model as the basis for all equipment of this class
6 This Specification does not cover requirements for the following related types of silicon materials and wafers:
NOTICE: This Document was completely rewritten in 2016
It is a guide for establishing electrostatic compatibility in facilities used for semiconductor manufacturing
G06600 - SEMI G66 - 半導体用プラスチックモールディングコンパウンドの吸湿特性の測定方法 Revision:SEMI G66-96 (Reapproved 0811) - Superseded This Document defines methods usedglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1996200411 : Referenced SEMI Standards None.
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