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P02900 - SEMI P29 - 減衰型位相シフトマスク(ハーフトーン型位相シフトマスク)およびマスクブランクスに特有な特性の仕様 StdTpc-Fire Safety 注意:委員會產生此文件的意圖是要依循此基準中"應"執行的規定,而符合使此基準之要求。

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Description

注意:委員會產生此文件的意圖是要依循此基準中"應"執行的規定,而符合使此基準之要求。

This Specification defines the interface plane between modules in a cluster tool

9% Hydrofluoric Acid (10:1 v/v)

4  In principle

The purpose of the process equipment adapter plate guide is to provide guidance on the expectations and application for process equipment adapter plates

P02900 - SEMI P29 - 減衰型位相シフトマスク(ハーフトーン型位相シフトマスク)およびマスクブランクスに特有な特性の仕様 StdTpc-Fire Safety 注意:委員會產生此文件的意圖是要依循此基準中"應"執行的規定,而符合使此基準之要求。global Micropatterning Committee200598global Audits and Reviews Subcommittee200510www. semi. org200511CD ROM19979 2005 Referenced SEMI Standards SEMI P1 Specification for Hard Surface Photomask Substrates SEMI P22 Guideline for Photomask Defect Classification and Size Definition

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