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PV05100 - SEMI PV51 - Test Method for In-Line Characterization of Photovoltaic Silicon Wafers by Using Photoluminescence Revision:SEMI PV51-0214 (Reapproved 0320) - Current Where feasible

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Description

Where feasible

whole-wafer flatness) use a center-referenced coordinate system

Current edition approved by the North American Regional Standards Committee on August 15

SEMI 3D3-1123 (technical revision)

集光角(またはいくつかの個々の角度)の範囲にわたって光散乱を測定することは,高速かつ経済的なモニタ手段となるが,ラフネス周波数の範囲にわたってテクスチャを定量化することはできない。そうした測定では,入射角,散乱角,光波長,開口,スポットサイズなどのさまざまな自由度があるため,比較可能な測定結果を得られるようにするには関係者の間で合意する必要がある。したがって,測定パラメータを一意的に定義し,関係者間で容易に交換できるようにするための手段が必要である。

PV05100 - SEMI PV51 - Test Method for In-Line Characterization of Photovoltaic Silicon Wafers by Using Photoluminescence Revision:SEMI PV51-0214 (Reapproved 0320) - Current Where feasibleMulticrystalline silicon (mc Si) wafers produced by casting and controlled solidification usually contain regions containing high grown in defect density in addition to the grain boundaries. These defects may consist of impurity elements as well as structural defects within grains such as dislocations and dislocation networks, which may impact the solar cell efficiency negatively. The defective areas are frequently close to the sidewalls and bottom of

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