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本書の目的は，(1) 20/0
propylene-glycol-mono-methyl-ether-acetate (PGMEA) and the mixture 70wt% PGME/30wt% PGMEA for which a need has been identified
This Specification deals with the mechanical interface (load port) for wafer carrier transfer between wafer carrier material transport systems
previously published November 2003
This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in
S01000 - SEMI S10 - 風險評估及風險估算過程之安全基準 Revision:SEMI S10-0307 - Superseded 本書の目的は，(1) 20/0EHS This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published December 1996; previously published November 2003. The purpose of this guideline is to establish general principles for risk assessment to enable identification of