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4 These test methods were developed for use on single crystal specimens of silicon
each tool type—and often each process chamber—has unique recipe settings for optimum etch performance for each material (typically silicon or silicon dioxide) and pattern
Refer to SEMI C90 for additional requirements for the use of polymers in LCDS
the bar code specifications
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300mm Fab Outlook - Subscription StdPbc-0615 4 These test methods wereThis report tracks more than 320 fabs lines worldwide and more than 50 companies and organizations around the world. [Subscription]
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