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4 This Specification applies specifically to prime silicon wafers with at least one chem-mechanically polished surface
4 This Standard can be applied to all through and blind vias as they occur in any flat surfaces made of glass
The flashing tendency for semiconductor grade molding compounds depends on the interaction of several variables
SEMI C28-0618 (technical revision)
It specifically clarifies the load in the test method and evaluation items in the evaluation method
F10500 - SEMI F105 - Guide for Metallic Material Compatibility in Gas Distribution Systems StdPbc-1011 4 This Specification applies specificallyThe purpose of this Guide is to document the industry acceptable compatibility of metallic materials with semiconductor process gases. This Guide is applicable to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment. It is not applicable to high pressure, bulk delivery systems. This Guide is specific to High Purity and Ultra High Purity chemical delivery systems. Referenced